Xradia Announces X-ray Fluorescence Imaging Tool
CONCORD, California – (Business Wire) – July 11, 2005: X-ray microscopy company Xradia, Inc. announced today the release of a new element-specific X-ray imaging tool for semiconductor metrology, Scanning Electron Microscopes (SEM) and Electron Probe Micro Analyzers.
The nanoXFiM X-ray fluorescence imager collects and images fluorescence X-rays characteristic of elements that emit them when exposed to X-ray or electron beams. The nanoXFiM images the spatial distribution of an element of interest in the sample, resolving feature sizes smaller than 100nm. Nearly all elements of the periodic table can be imaged in this manner. The first application of the nanoXFiM is in semiconductor manufacturing, using electron beam excitation to characterize production wafers in semiconductor wafer fabs.
The fluorescence imager also attaches to Scanning Electron Microscopes and Electron Probe Micro Analyzers, providing users with powerful new imaging capability, allowing non-destructive, element-specific subsurface imaging inside samples of interest. Resulting images are obtained by exploiting the ability of electron and X-ray beams to penetrate below the surface of the sample and produce element-specific fluorescence images that contain depth information.
“X-ray fluorescence imaging allows for the visualization of complex structures, one element at a time, in the domain of tens of nanometers,” said Dr. Wenbing Yun, Xradia founder and President. “This is a potent new tool for nanotechnology, biotech and semiconductor manufacturing with the potential to revolutionize the field of microscopy,” commented Bill Diamond, Xradia CEO. The nanoXFi is currently in production and shipping to initial OEM customers.
About Xradia, Inc.
Xradia, Inc. is a privately held company established in 2000 to commercialize high-resolution 3D X-ray microscopes for nondestructive inspection and nano-scale imaging. Initially targeted at failure analysis in the semiconductor IC industry, subsequent developments have led to a suite of commercial X-ray imaging products that have permitted expansion into markets that include basic research, metrology in semiconductor IC production, biomedical research and nanotechnology development. These advanced systems offer outstanding nondestructive imaging capabilities. These include nanometer resolution 3D imaging of complex objects, such as IC chips and biological specimens and element-specific imaging for process control and monitoring in IC manufacturing. The company also supplies advanced X-ray imaging components and state of the art imaging systems to the synchrotron research community. The company is rapidly expanding in 2005 in response to growing demand for its unique X-ray imaging products.
The Carl Zeiss Group is an international leader in the fields of optics and optoelectronics. In fiscal year 2011/12 the company’s approximately 24,000 employees generated revenue of nearly 4.2 billion euros. In the markets for Industrial Solutions, Research Solutions, Medical Technology and Consumer Optics, ZEISS has contributed to technological progress for more than 160 years and enhances the quality of life of many people around the globe. The Carl Zeiss Group develops and produces planetariums, eyeglass lenses, camera and cine lenses and binoculars as well as solutions for biomedical research, medical technology and the semiconductor, automotive and mechanical engineering industries. ZEISS is present in over 40 countries around the globe with about 40 production facilities, over 50 sales and service locations and service locations and approximately 20 research and development sites. Carl Zeiss AG is fully owned by the Carl Zeiss Stiftung (Carl Zeiss Foundation). Founded in 1846 in Jena, the company is headquartered in Oberkochen, Germany.
About Carl Zeiss Microscopy
The Microscopy business group at ZEISS is the world’s only manufacturer of light, X-ray and electron microscopes. The company’s extensive portfolio enables research and routine applications in the life and materials sciences. The product range includes light and laser scanning microscopes, X-ray microscopes, electron and ion microscopes and spectrometer modules. Users are supported for software for system control, image capture and editing. The Microscopy business group has sales companies in 33 countries. Application and service specialists support customers around the globe in demo centers and on site. The business group is headquartered in Jena, Germany. Additional production and development sites are in Oberkochen, Göttingen and Munich, as well as in Cambridge in the UK and Peabody, MA and Pleasanton, CA in the USA. The company has around 2,800 employees and generates revenue of 650 million euros. www.zeiss.de/press
Dr. Jochen Tham
Phone +49 3641 64-3949
ZEISS, Carl Zeiss X-ray Microscopy
Phone +1 510 414 6772