VersaXRM-500 – Highly Versatile X-ray Microscope
True Submicron Spatial Resolution at Millimeters to Inches from Source
Performance beyond micro-CT. The VersaXRM is an X-ray microscope, employing a turret of objectives. This design produces two-stage magnification, enabling the user to select magnification by changing objectives or by changing the geometric magnification. Traditional micro-CT systems are limited to just geometric magnification. The VersaXRM enables control over resolution and phase contrast across a wide range of sample sizes and a large working distance.
The VersaXRM builds on the superior resolution, contrast and versatility inherent in Xradia platforms, including true submicron spatial resolution-a better indicator of imaging quality than merely spot, pixel or voxel size, or detail detectability-even at millimeters or inches from the source. At the same time, it supports high resolution at large working distances suitable for in situ study using environmental chambers or load cells, and 4D (over time) or under varying environmental conditions.
Benefits
- Microscope design enables highest resolution at the largest working distance from the source, a prerequisite for in situ and large sample imaging
- Multi-length scale imaging of the same sample across a wide range of magnifications, down to <0.7 µm True Spatial Resolution™
- Supports a wide variety of in situ rigs for submicron imaging of practical sized samples (mm to inches) with weight capability up to 15 kg
All VersaXRM are equipped with robust, maintenance free closed tube X-ray sources, and highly stable and repeatable sample stages. In addition, these systems are designed to have significantly diminished cone angle artifact as opposed to traditional CT systems using flat panel detectors.
Applications
Semiconductor 3D Package Process Optimization and Failure Analysis
The VersaXRM-500 offers non-destructive submicron resolution tomographic capability, able to visualize buried features without de-packaging, cutting, or otherwise destroying the device, a process that can potentially introduce physical artifacts. This can also prevent the loss of critical information about the root cause of the failure as a result of destructive imaging methods.
Materials Science
Provides view into deeply buried microstructures that may be unobservable with 2D surface imaging such as optical microscopy, SEM, and AFM; offers a wide span of abilities, from visualizing cracks in soft composite materials to measuring porosity in steel. Unique ability to maintain resolution at a distance for in situ imaging experiments in real world environments, such as tensile/compression and temperature variation tests; delivers superior flexibility with support of sample sizes up to 300 mm.
Life Science Research
The versatility inherent on the platform, including industry-leading phase and absorption contrast, advances studies of soft and hard tissue, both stained and unstained, from microstructure to nanostructure, for applications such as quantification of osteocyte lacunar properties (volume, density, etc.) in bone morphology and investigation of unstained soft cartilage tissue.
Oil & Gas Exploration
The Scout-and-Zoom™ process begins with a quick survey scan (scout) to identify a volume of interest before a high resolution scan (zoom) is performed on the identified region, thus achieving highest resolution of detailed structure and pore connectivity within a representative region. The resulting 3D data set may be used for special core analysis (SCAL) simulations with a faster time to results (days or weeks vs. months or years) and improved quantification of detailed structure and pore connectivity across a wide range of magnifications and sample volumes.