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Resolution Test Patterns

Xradia offers a high resolution and calibration standard test pattern for calibrating and evaluating the spatial resolution and performance of X-ray imaging systems. The test pattern is fabricated using the same process that enables the manufacturing of Xradia's zone plate lenses that have the highest performance in terms of spatial resolution and focusing efficiency for multi-keV and high energy X-ray imaging/focusing applications. The test pattern has a variety of structures that enable resolution tests, modulation transfer measurements, length scale calibration and field distortion measurements.

The finest feature size on the pattern for X500-200-30, X30-30-1, and X50-30-0 is 0.5 µm, 30 nm, and 50 nm respectively. All test structures are labeled for easy identification. The large thickness of this pattern is ideal for high energy X-ray applications above 10 keV.